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KLA-Tencor releases PROLITH X4 (64bit)

This latest PROLITH release allows for advanced chemically amplified (Stochastic) resist modeling for LER/ LWR simulation, wafer topography, Fast Mask EMF and 64bit processing. X4 has enhanced hot spot OPC capability.

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Smart Imaging Technologies releases ChipInsight software.

ChipInsight is a full-chip image contour analysis tool.

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E-Reticle : ESD Monitor for Lithography and Metrology tools.

The E-Reticle, from Benchmark Tech., allows for in-situ observation of potentially damaging electric fields. “Read more about the E-Reticle“

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