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Microtome
manufactures
reticle cassettes for improved reticle protection from physical damage
and ESD
- Reticle Cassettes
- The best possible protection including ESD and EFM (reticles are shielded by a Faraday Cage)
- Tighest dimensional tolerance to provide the safest reticle handling solution
- All plastic interface
- Contamination avoidance – plastic doesn’t contain additives responsible of haze formation and particles generation
- Repair and recertify program
- Fully approved by ASML, Nikon and Canon
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