KLA-Tencor releases PROLITH X3.2.2(64bit) This latest PROLITH release allows for advanced chemically amplified (Stochastic) resist modeling, wafer topography, Fast Mask EMF and 64bit processing Smart Imaging Technologies releases ChipInsight software. ChipInsight is a full-chip image contour analysis tool. E-Reticle : ESD Monitor Tool for Lithography The E-Reticle, from Benchmark Tech., allows for in-situ observation of potentially damaging electric fields.    "Read more about the E-Reticle "