KLA-Tencor releases PROLITH X3.1 This latest PROLITH release allows for Stochastic resist modeling. Smart Imaging Technologies releases ChipInsight software. ChipInsight is a full-chip image contour analysis tool. E-Reticle : ESD Monitor Tool for Lithography The E-Reticle, from Benchmark Tech., allows for in-situ observation of potentially damaging electric fields.    "Read more about the E-Reticle "