Benchmark: Reticles and software for process and equipment analysis

Benchmark Technologies designs reticles for stepper set-up evaluation and resolution / resist process evaluation.

Benchmark Phase Shift Focus Monitor has been noted the most stable focus tool available and has the ability of mapping aberrations. Benchmark has reticle designs that allow engineers to quantify notching issues and better understand resolution capability. The Benchmark matching retilces and Omni Match software allow customers to match scanners and steppers from different OEM’s, as well as monitoring production overlay.

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