Microtome: Reticle Cassettes and pods for SMIF equipped lithography tools.

Microtome manufactures reticle cassettes for improved reticle protection from physical damage and ESD

  • Reticle Cassettes
    • The best possible protection including ESD and EFM (reticles are shielded by a Faraday Cage)
    • Tighest dimensional tolerance to provide the safest reticle handling solution
    • All plastic interface
  • Contamination avoidance – plastic doesn’t contain additives responsible of haze formation and particles generation
  • Repair and recertify program
  • Fully approved by ASML, Nikon and Canon

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