Microtome manufactures reticle cassettes for improved reticle protection from physical damage and ESD

• Reticle Cassettes
  • The best possible protection including ESD and EFM (reticles are shielded by a Faraday Cage)
  • Tighest dimensional tolerance to provide the safest reticle handling solution
  • All plastic interface
• Contamination avoidance – plastic doesn’t contain additives responsible of haze formation and particles generation
• Repair and recertify program
• Fully approved by ASML, Nikon and Canon

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